Electrostatic discharge event and transient signal detection and measurement device and method

ABSTRACT

An electrostatic discharge (ESD) event and transient signal detection and measurement device and method are described. The device and method are able to distinguish between an ESD event and other non-ESD events.

FIELD OF THE INVENTION

The invention relates generally to a system and method for detecting andmeasuring an electromagnetic signal and in particular to a system andmethod for detecting and measuring an electrostatic discharge (ESD)events.

BACKGROUND OF THE INVENTION

It is well known that electrostatic discharges (ESD) can damageelectronic devices. Examples of such sensitive devices are semiconductorwafers, magnetic heads for disk drives, integrated circuits, otherelectronic components and circuits, etc. The ESD can disrupt operationof an electronic circuit as well. In non-electronic applications such aspowder handling, etc., ESD can be a cause of fire.

Short transient spike-like signals resulting from ESD events,commutation of electric motors, solenoids, etc. and from other sourcescan also induce damage to electronics devices and cause circuitmalfunction. Also, improperly done ground wires can be a media fortransmitting surges as well.

Presently, the most common method of reducing damages caused by ESD ispreventive: grounding wrist-wraps, conductive chairs, conductive floorcoating, ionizers, etc. All these measures are supposed to reduce oreliminate build-up of static voltage that causes discharges. However,the ultimate indication of the effectiveness of ESD-preventive measuresis actual occurrence of electrostatic discharge (ESD) events known asESD Events. The detection, measurement of magnitude of the ESD Eventsand data logging the data for future analysis presents valuableinformation for assessment of the ESD environment, ESD protection,real-time addressing of the ESD problems, determining most likelydefects due to ESD, and statistical process analysis.

The ESD Event detection devices available today, such as that shown inU.S. Pat. No. 4,631,473 to Sanki and Lucent' T100 provide an indicationof ESD events that exceeded a pre-set level. However these devicesmerely detect that ESD Events have occurred without the ability tomeasure the magnitude of the ESD Events. The knowledge of the magnitudeof ESD Events provides valuable information pertinent to assessment ofpotential damage caused by ESD and also effectiveness of ESD-preventivemeasures. In addition, existing devices are geared towards occasionalESD checks, rather than day-to-day ESD monitoring. The continuous ESDmonitoring would offer a real-time indication of ESD problems andprovide immediate feedback for implementation of ESD-corrective andpreventive measures.

ESD events last for a very short period of time (typically,nanoseconds). This makes it very difficult to provide a measurement ofthe magnitude of these ESD events in a practical cost-effective anduser-friendly manner. Often, a high-speed oscilloscope and an antennaare used to capture the waveform of an ESD Event for analysis of itsmagnitude. This technique is not practical for everyday use. Thus, it isdesirable to provide a device that is able to detect ESD events, themagnitude of the ESD events and distinguish actual ESD events from othertransient signals. Thus, it is desirable to provide an ESD event andtransient signal detection and measurement device and method and it isto this end that the present invention is directed.

SUMMARY OF THE INVENTION

A method and the implementation of improved accuracy of measurement ofESD events are described. The system and method permits an actual ESDEvent signal to be distinguished from other non-ESD Event signals. Thesystem may use filtering and/or pattern recognition to detect the ESDEvent signals. In an embodiment, the system may be a low bandwidthactive electronic circuit that responds in a particular manner to asignal having characteristics similar to an ESD Event signal andresponds in a different manner to other signals. In a preferredembodiment, the low bandwidth active electronic circuit may be anoperational amplifier or a follower circuit. The pattern recognition maybe implemented in software or hardware.

Thus, in accordance with the invention, a device for detection ofelectromagnetic emission events is described. The device has a receiverthat receives an electromagnetic emission and a low-bandwidth activeelectronic circuit with a bandwidth lower than a bandwidth of thereceived electromagnetic emission. The low-bandwidth active electroniccircuit generates a slowly decaying output signal in response to thereceived electromagnetic emission having a predetermined rise time sothat an electromagnetic emission event with a predetermined rise time isidentified.

In accordance with another aspect of the invention, a device foridentifying an ESD event is provided. The device has a receiver thatreceives an input signal and an identifier unit that compares thereceived input signal to a predetermined signal in order to determine ifthe input signal is an ESD event signal. The device may also have anoutput circuit for outputting an identification signal if the inputsignal is identified as an ESD event signal.

In accordance with another aspect of the invention, a device foridentifying an ESD event is provided that includes a receiver thatreceives an input signal, the input signal having an envelope and anidentifier unit that compares the received input signal envelope to apredetermined signal envelope in order to determine if the input signalis an ESD event signal. The device may also have an output circuit foroutputting an identification signal if the input signal is identified asan ESD event signal.

In accordance with another aspect of the invention, a device formeasuring an emission signal from a distance is provided. The device hasa receiver that receives an input signal and a signal distance measuringunit that determines a distance to the input signal. The device also hasa signal strength determining unit that determines a strength of theinput signal based on the input signal and the distance to the inputsignal. The distance may also be entered into the device manually.

In a different aspect, an electrostatic discharge event emissiondetection device is provided. The device is a receiver that receives aninput signal and a signal distance measuring unit that determines adistance to the input signal. The device also has a signal strengthdetermining unit that determines a strength of the input signal and aprocessor that determines a voltage that caused the input signal, thevoltage being determined based on the distance to the input signal, thestrength of the input signal and a model of discharge of the inputsignal.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 a illustrates a typical waveform of an electrostatic dischargeevent;

FIG. 1 b illustrates a typical waveform of other transient signals;

FIG. 1 c is a diagram illustrating an amplifier made with a operationamplifier;

FIG. 2 illustrates the operation of the amplifier of FIG. 1 based on twodifferent input signals;

FIG. 3 is a diagram illustrating a device for electrostatic dischargeevent measurement device in accordance with the invention when anelectrostatic discharge event occurs;

FIG. 4 is a diagram illustrating the device of FIG. 3 when anon-electrostatic discharge event occurs;

FIG. 5 is a diagram illustrating an example of an implementation of apreferred embodiment of the device in accordance with the invention;

FIG. 5 a illustrates a different implementation of the operationalamplifier U1A shown in FIG. 5;

FIG. 5 b illustrates another implementation of the device in accordancewith the invention using an additional operational amplifier;

FIG. 6 is a microprocessor-based circuit that can be connected to thedevice shown in FIG. 5;

FIG. 7 a illustrates a wire bond tool signal event;

FIG. 7 b illustrates a plurality of events grouped together;

FIG. 7 c illustrates another plurality of events grouped together;

FIG. 8 a illustrates a method for rejecting non-ESD events in accordancewith the invention;

FIG. 8 b illustrates how the method in FIG. 8 a separates ESD events andnon-ESD events;

FIG. 9 a is a hand held device in accordance with one embodiment of theinvention;

FIG. 9 b is a hand held device in accordance with another embodiment ofthe invention;

FIG. 10 is characterization chart of ESD events;

FIG. 11 a illustrates a method for initial set-up in accordance with theinvention;

FIG. 11 b illustrates a method for operation of the device in accordancewith the invention;

FIG. 12 a illustrates an example of another embodiment of the device inaccordance with the invention;

FIG. 12 b illustrates a screen shot of the device of FIG. 12 a duringset-up;

FIG. 12 c illustrates a screen shot of the device of FIG. 12 a duringHBM discharge model selection;

FIG. 12 d illustrates a screen shot of the device of FIG. 12 a showingthe measurement results;

FIG. 13 a illustrates an example of another embodiment of the device inaccordance with the invention;

FIG. 13 b illustrates a method for measurement in accordance with theinvention;

FIGS. 14 a-14 d illustrate an implementation of a circuit in accordancewith the invention for determining the type of discharge and dischargewaveforms examples, respectively;

FIGS. 15 a-15 d illustrate another implementation of a circuit inaccordance with the invention for determining the type of discharge anddischarge waveforms examples, respectively;

FIGS. 16 a-16 c illustrate another implementation of a circuit inaccordance with the invention using a envelope detector for determiningthe type of discharge and discharge waveforms examples, respectively;

FIGS. 17 a and 17 b illustrate another embodiment of the circuit fordetermining the type of discharge and the method of operation,respectively; and

FIGS. 18 a and 18 b illustrate yet another embodiment of the circuit fordetermining the type of discharge and the method of operation,respectively.

DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT

The invention is particularly applicable to a device and method for ESDevent measurement and it is in this context that the invention will bedescribed. It will be appreciated, however, that the device and methodin accordance with the invention has greater utility since the devicecould also detect and measure other electromagnetic signals andtransient events.

FIG. 1 a illustrates a typical waveform 10 of an electrostatic dischargeevent. In general, electrostatic discharge (ESD) event detection andmeasurement may be accomplished by receiving, processing and analyzingan electromagnetic field generated by the ESD events. In particular, anESD Event generates an electromagnetic field and electrical signals incircuits that have very specific envelope characteristics, i.e. a verysharp or short rise time (typically, within 1 or 2 nanoseconds) and avery short duration. While known devices are capable of measuring anddetecting the signal 10 shown in FIG. 1 a, the known devices alsotypically detect and measure other non-ESD event transient signals, suchas signals from stepper motors, relays, etc., whose characteristics aresimilar in spectrum and envelope to the ESD events. FIG. 1 b illustratesa typical waveform 12 of these other transient signals. As seen, thesignals 10, 12 both have short duration and their spectral content issomewhat similar. The difference, however, is not in the duration orspectral content of the signal, but in the details of signal envelope.In particular, the rise time of the signal from ESD events is extremelyshort and abrupt and the signal decay has a specific shape while signalsfrom other sources (here forth called “EMI Events”) have moregradual/longer rise times (approximately tens or hundreds of nanseconds)and similarly more gradual decay time. Typical devices cannot completelyseparate such signals due to high bandwidth of its detection circuitthat would capture EMI Events as well. Thus, it is highly desirable tobe able to separate valid ESD Events from non-ESD EMI Events with thepurpose of accuracy and validity of measurements.

FIG. 1 c is a diagram illustrating an amplifier 18 made with a operationamplifier 20 (“op-amp.”) The operational amplifier 20, which maypreferable be a high-speed CMOS operation amplifier, exhibits a highlyrepeatable and reproducible phenomenon where a rapid transient signalwith a rise time similar to ESD Events causes a much-longer electricalsignal at the output of the op-amp. Other circuitry based largely onCMOS devices can also exhibit this behavior. For example, audioamplifiers and pre-amplifiers, and video amplifiers may also exhibitsimilar behavior. Broadly, the circuits that exhibit this behavior maybe known as low-bandwidth active electronic circuits. For purposes ofillustrating, an operational amplifier embodiment of the invention willbe described below, but the invention is not limited to the operationalamplifier embodiment.

The amplifier 18 based on a high-speed CMOS op-amp 20 may furthercomprise resistors 22, 24 and 26 that are appropriately selected and acapacitor 28 that receive an incoming signal 40 that is received by anantenna 30. In this embodiment, the CMOS op-amp 20 has to havesufficient bandwidth (typically at least 40 MHz) but which is stillsignificantly lower than the bandwidth of the ESD Event itself, and thebias resistor 26 is preferably of high value (typically, severalMegaOhms). Then, if the signal received by the antenna 30 has thecharacteristics of an ESD Event signal 40, then the amplifier 18generates a significantly longer decaying signal 42 with the magnitudeproportional to the magnitude of the ESD Event signal. The output signal42 is also influenced by the rise time of the input signal 40 since ashorter rise-time results in a higher amplitude output signal. Thepolarity of the output signal will be the same as the polarity of theinput signal. In accordance with the invention, the circuit that usesthe op-amp 20 does not have to be an amplifier since the circuit can bea simple follower, in which resistor 24 would be absent and resistor 22would be a simple jumper of 0 Ohms value.

If the input signal 44 having a different waveform than the ESD Eventsignal 40 is received by the circuit 18, the rise-time of that inputsignal 44 may not be sufficient to generate the output signal as in theprevious case. In addition, due to limited bandwidth of the op-amp, itmay also be incapable of passing signal of high frequency such as 44.Therefore, an output 46 of the circuit 18 in response to the inputsignal 44 does not capture the presence of the input signal. Thus, asshown in FIG. 1 c, the circuit 18 operates with the result being thatonly ESD Event signals are captured while EMI Event signals are largelyignored. Thus, the circuit operates as a discriminator/filter that istuned to the characteristics of the ESD Event signal.

FIG. 2 illustrates the operation of the amplifier of FIG. 1 based on twodifferent input signals. The circuit would also operate to filter out aninput non-ESD signal that has sufficiently low bandwidth that is withinthe range of the op-amp due to the characteristics of the output signal.For example, an input signal 50 has significantly different propertiesbut has limited bandwidth that causes the circuit 18 to generate anoutput signal 52 due to the slow rise and fall times of the inputsignal. However, as seen, the signals produced by the ESD Event signal40 and a non-ESD signal 50 at the output of op-amp 20 are very differentas shown by output signals 42 and 52.

FIG. 3 is a diagram illustrating a device 19 for electrostatic dischargeevent measurement device in accordance with the invention when anelectrostatic discharge event occurs. The device 19 in FIG. 3 is able todistinguish between the two output signals shown in FIG. 2. In thisdevice 19, the circuit 18 with the op-amp 20 is used. As above, theinput signal 40 generates an output signal 60 at the output of op-amp20. The device 19 may further comprise a high-pass filter at the outputof the op-amp 20 wherein the high-pass filter may include a capacitor 62and a resistor 64. An output signal 66 from the high-pass filter has asharp front and a very short duration that is independent on duration ofthe signal 60. The device 19 may further comprise a peak detector thatincludes a diode 68, a capacitor 70 and a resistor 72 connected as shownin FIG. 3 where the values of these components 68, 70, 72 are set suchthat an output waveform 74 closely represents the waveform of the outputsignal 60 in case of an ESD Event. The device 19 may further comprise anamplifier circuit that has an op-amp 76 with resistors 78 and 80 thatbuffers and amplifies the signal from the peak detector. The device 19may have a voltage divider, connected to the output of the amplifiercircuit, that comprises resistors 82 and 84. The signal 60 at the outputof the op-amp 20 is connected to a central input of a window comparator86. An upper limit input of the window comparator 86 is connected to theoutput of the op-amp 76 and a lower limit input of said windowcomparator is connected to the output of the voltage divider comprisedof resistors 82 and 84. The window comparator is a known circuit thatproduces an out-of-bounds output signal when the envelope of the signalat the central input is between the envelopes of the signals at thelower and high limit inputs. Thus, as seen, if the input signal 40 has awaveform of an ESD Event signal that generates the output signal 60, theenvelope of output signal 60 is below a signal 88 that is present at theupper limit input of the window comparator, but higher than the a signal90 present at the lower limit input of the window comparator. In thiscase, the window comparator will not produce an “outside of limits”signal. It should be noted that the operation described above can beperformed entirely or in part by a microprocessor and AID converterwhere both have sufficient operational speed to process the signals. Ina preferred embodiment, however, the filtering is done via hardware asshown in FIG. 3 so that a lower-grade microprocessor and A/D convertercan be used which reduces the cost of the device. Instead of the windowcomparator that compares the envelope of the two signals, the inventionmay also compare the spectrum of the received signal to the spectrum ofa known ESD event signal. The spectrum of the signal is a predeterminedamount of energy at one or more frequencies.

FIG. 4 is a diagram illustrating the device 19 of FIG. 3 and itsoperation when an EMI event occurs and an EMI event signal 50 isreceived by the device 19. In this case, a signal 52 that is provided tothe central input of the window comparator is quite different from theone from the case of ESD Event, but a signal 74 at the input of theop-amp 76 still retains the approximation of the waveform of the case ofan ESD Event. Since the signal 52 is so radically different from theexpected ESD Event-caused waveform 74, the signal triggers the windowcomparator 86 which in turn produces a pulse 87 indicating that theinput signal has waveform different from the one of ESD Event and thusthe registered event is a false one.

FIG. 5 is a diagram illustrating an example of an implementation of apreferred embodiment of the device 19 in accordance with the invention.An antenna 109 is connected to a jack J1. The signal from J1 is sent viacapacitor C1 to the non-inverting input of op-amp U1A. A resistor R1provides DC bias to the op-amp U1A and the op-amp U1A is powered frompositive and negative power supplies VDD and VEE respectively. Thespecific construction of power supply is not a subject of this inventionand is not shown here. A set of resistors R3, R49 define the gain of theop-amp U1A as is well known. In order to be able to detect and measureESD Events of various magnitudes, an analog switch U11 and a resistor R6may be used to increase the gain of the op-amp U1A. The switch U11 istypically controlled by a microprocessor or by a manual switch. Withinthe scope of this invention, instead of a single-step analog switch asshown, other means of gain control can be employed, such as a multi-stepanalog switch or a digitally-controlled potentiometer that can have morethan one gain setting, or alternatively, there could be manualadjustment of gain by either potentiometer or a switch arrangement.

The op-amp U1A may also be implemented in a slightly different manner.In particular, FIG. 5 a depicts the op-amp U1A with two back-to-backdiodes D1 and D2 that provide a pseudo-logarithmic characteristic to thegain of U1A thus increasing its dynamic range without switching thegain.

While FIGS. 3, 4 and 5 depict an envelope detector based on hardwarecomponents, it should be noted that the envelope comparator function canbe performed entirely or partially in software executing on a processorwherein the software operates in a similar way. The software may have alook-up table or a formula with the method that forms the upper andlower limits of the envelope and then the input signal is converted intoa digital signal and compared to these levels.

Returning to FIG. 5, the output of op-amp U1A is connected to aninverter comprised of an op-amp U1B and resistors R2 and R4. Thisinverter is needed to assure that ESD Events of both polarities aremeasured equally well. A set of capacitors C19 and C19 and resistors R23and R28 comprise high-pass filters and a diode D2 sums signals from bothof them and, in combination with resistors R29 and R58 and capacitorC21, forms a peak detector. At the output of this peak detector, thesignal closely resembles the one at the output of op-amps U1A or U1Bwhen a genuine ESD Event signal is applied. An op-amp U1C with resistorsR5 and R60 comprises an amplifier for the signal output from the peakdetector. The output of this amplifier is connected to the central inputof a window comparator that is comprised of a set of comparators U2A andU2B and resistor R92 wherein each comparator is preferably implementedusing an op-amp. The outputs of op-amps U1A and U1B are also connectedto the anodes of a dual diode D1 and the cathode of this diode isconnected via a set of DC blocking capacitors C22 and C23 to a set ofvoltage dividers R17/R41 and R18/R42, respectively. These voltagedividers provide different DC levels for the high and low inputs of thewindow comparator (see input 3 of op-amp U2A and input 13 of op-ampU2B.)

If the signal received by the device 19 is a signal generated by an ESDEvent, then the waveform at the output of op-amp U1C will be between thelow and high voltages at the appropriate inputs of window comparator andthe output of window comparator will not change state. If the inputsignal waveform is different from a waveform of an ESD Event, then thesignal at the output of U1C will either exceed the high level input ofwindow comparator or go below the low level input of said comparator. Ineither case, the window comparator will produce a pulse as shown in FIG.5 indicating that the event registered is a false event and shall beignored. It should be noted that, in accordance with the invention, thecomparator may also be implemented entirely in software if asufficiently fast microprocessor and A/D converter are used.

A comparator formed with an op-amp U1D and resistors R87 and R88generate a pulse when an event signal exceeds a threshold set byresistors R87 and R88. This signal can be used to indicate that an eventhas occurred. The output of op-amp U1D is connected to resistor R92 sothat, whenever there is a true ESD Event, signal T_EVENT generatespositive pulse. This T_EVENT pulse can trigger visual alarm comprised ofa resistor R95 and a diode D9 and/or audible alarm such as buzzer SP1.It should be obvious to skilled in art that various types of alarmscould be employed, such as relay contacts, etc.

The measurement of the strength of the ESD Event can be made at variouspoints in the device 19. For example, the outputs at points 100 through108 (shown within circles in FIG. 5) can be used for measurements of thestrength of ESD Events. The measurement at points 106 and 108, thoughnot of direct signal, are nevertheless valid since, for legitimate ESDEvents, the signal at said points 106 and 108 is a close representationof the original signal at the output of op-amp U1A. These outputs canprovide signals to analog-to-digital converters or any other measurementdevices, including bar graph indicators, analog meters and alike. Ifsuch measurement or indication device requires longer time due to slowspeed of measurement and indicating devices, then a peak-hold detectorcomprised of op-amps U4C and U4D, diodes D4 and D5, resistors R53, R24,R25, R32 and R32 and a capacitor C20 will “stretch” the pulse to therequired length. If a microprocessor is used for signal measurements,then it can discharge the capacitor C20 after the measurement has beensuccessfully made so that the signal will be present on capacitor C20for as long as the analog-to-digital signal capture takes place.

FIG. 5 b illustrates another embodiment of the device 19 in which likeelements have like reference numerals and operate in the same mannerunless indicated otherwise. In this embodiment, an additional comparatorU2C may be included so that the device is able to provide a signalindicating whether an ESD Event has positive or negative polarity. Asseen in FIG. 5 b, an output of first op-amp U1A is connected to anon-inverted input of an opamp U2C which is configured to work as acomparator. A non-inverted input of this opamp is connected to a voltagereference source that can be derived in any known way, such as resistivevoltage divider, etc. If case of an ESD Event of positive polarity, theoutput pulse from the opamp U1A, the output of comparator U2C will bepositive indicating polarity of the event. In case of negative polarityof ESD Event, the output of comparator U2C will be zero. This way adetermination of polarity of ESD Event can be achieved.

FIG. 6 is a microprocessor-based circuit 120 that can be connected tothe device shown in FIG. 5. The microprocessor-based circuit is capableof measuring the signal, storing the data and communicating the data.The circuit 120 may comprise an analog-to-digital converter (A/D) 150and can have any number of signal inputs as shown. The A/D converterconverts the analog signals from the circuit shown in FIG. 5 into adigital signal as is well known. The output of A/D 150 is connected to amicroprocessor 152 with associated memory 154. In a preferredembodiment, the A/D 150 may be embedded in microprocessor itself. Themicroprocessor 152 performs measurements of the signal(s) and providesdata to any or all of the following devices: a display 156 that can showeither magnitude of the discharge or the count of discharges with areset button 158, an LED 160, an audio buzzer 162 that can used with asound on/off switch 162, or any other indicators and displays. In orderto perform measurement of the signals and generation of data based onthe signals, the memory 154 may store firmware/software that is executedby the microprocessor to perform the measurement and data generationoperations. In addition, the circuit 120 may have a D/A converter 166(also embedded in microprocessor 152 in the preferred embodiment) thatcan provide analog signal(s) to any of the external measurement devices,such as data acquisition system in various formats, such as 0 . . . 5V(168) or 4 . . . 20 mA (170). In addition, the microprocessor 152 canprovide outputs in digital format, such as serial RS232 or RS485 174,TCP/IP/Ethernet 176, offer data in a dial-up connection 180 or viawireless connection 182, or even have an embedded web server 184.

While the above-described device rejects signals that have waveformsdifferent from ESD Events, there are still some events that may haveESD-like waveform, such as relay contacts commutation, that may berecognized as legitimate ESD signals by the device described above. Inorder to discriminate against such non-ESD signals, another embodimentof the invention also may employ a method of pattern recognition. Inparticular, ESD Events are random by nature and all ESD Events arecaused by discharge of accumulated static voltage. Static voltage iscreated by a tribocharge, or separation of two dissimilar materials. Dueto the nature of mechanical movements, the charge created on componentsin a typical process is different every time. ESD discharges do nothappen in a regular pattern on a highly repeatable basis. At the sametime, signals from relay commutation, etc. occur highly regularly andoften have similar magnitude. Thus, this embodiment of the inventiondistinguishes between ESD Events (which are random and of differentmagnitude each time) and non-ESD events (which are periodic and/or havea similar magnitude each time.)

FIG. 7 a illustrates a wire bond tool signal event. As seen, a serial ofsignals 200 caused by a series of events occur on a highly-periodicbasis even though they have different magnitudes. This signal patternindicates a non-ESD Events. A series of signals 202, however, occur onlysporadically and qualify as ESD Events. FIG. 7 b illustrates a pluralityof events 204 that are clustered together and are approximately similarin magnitude which would tend to indicate that the series of events arenot ESD Events. FIG. 7 c illustrates another plurality of events groupedtogether in which the events 206 in FIG. 7 c are random and inconsistentin magnitude thus qualifying for being ESD Events.

FIG. 8 a illustrates a method for rejecting non-ESD events using patternrecognition in accordance with the invention. In step 250, an eventsignal is captured and stored in memory, that could be configured as aFIFO or in other usable configuration, in step 252 continuously duringthe measurement process. In accordance with the invention, continuouspattern recognition is performed in step 254 on the stored event signalsand if a pattern is identified in step 256, events that are part of thepattern are discarded in step 260 and only the events that are not partof the pattern are accepted in step 264. In step 266 and 268, the ESDEvent is reported as an ESD Event.

FIG. 8 b illustrates how the method in FIG. 8 a separates ESD events andnon-ESD events. In this figure, the output of the measurement device,such as output of 0 . . . 5V 168 of FIG. 6 is shown. As seen, a seriesof event signals 270 (from a series of events) are of approximately thesame amplitude and are highly repeatable. This indicates that theseevents are caused mostly by operation of machinery and not by staticelectricity. These events will be rejected by the method of FIG. 8 a. Aseries of events 276, however, are random in time and are random inmagnitude so that this series of events qualifies them as genuine ESDEvents and they will be accepted by the method. In combination with theapproach described in FIG. 3, this method provides highly accuratedetection and measurement of ESD Events while rejecting other signals.

FIG. 9 a is a hand held device 300 in accordance with another embodimentof the invention. This device 300 has an antenna 302, a LED indicator304, an audio indicator 306, power switch 308, power indication LED 310,range switch 312 that allows measurement of ESD Events over a widerange, a Logarithmic/Linear scale change switch 314, alarm leveladjustment switch 316 and a headphone jack 318. Obviously, not all shownelements have to be in the device in order to utilize the proposedinvention. In this particular case, LED bar indicator shows relativestrength of ESD Events. Alarm level potentiometer adjusts the levelabove which an ESD Event is displayed and/or the sound alarm is on. Thehandheld device 300 also incorporates the device 19 shown in FIG. 5 andthe method shown in 8 a that perform the discrimination and otherprocessing of the incoming signals. It should be obvious to a skilled inart that not only portable devices, but also bench-top devices withinterface to a data acquisition system can be implemented using proposedinvention.

FIG. 9 b is the hand held device 300 in accordance with anotherembodiment of the invention. In this embodiment, the device 300 has twoadditional LEDs 320 that indicate the polarity of ESD Event as itoccurs. FIG. 9 c is another embodiment in which the device 300 has anLED bar graph 326 that indicates separately the magnitude of thepositive and negative polarity of discharges. The magnitude of thenegative polarity of the discharge may be displayed on the left-handside of the LED bar graph while the positive polarity of the dischargemay be displayed on the right-hand side of the LED bar graph.

Users often need to know the magnitude of the event correlated with thestrength and the model of the discharge as defined by common practice,such as by ESD Association. Such practice defines several models ofdischarges, such as CDM (Charged Device Model), HBM (Human Body Model)and several others. The strength of the discharges is shown in terms ofstatic voltage causing the discharges, such as, for example, 200V CDM,or 2000V HBM. In order to present measurements of ESD Events done byreceiving electromagnetic fields from the discharge in this form, aninstrument must be characterized for specific models of discharge andbased on measurement distance from the discharge. The devices shown inFIGS. 9A, 9B, 9C, 12 and 13 may be used to measure an emission/inputsignal wherein the emission/input signal may be any electromagneticemission, electric field or magnetic field emission as well as any soundor ionizing radiation emission, such as an alpha, beta or gamma ray.

FIG. 10 shows an example of such characterization data with an ESD Eventmonitor for CDM-type discharge. The output of this monitor is 0 . . .5V. As seen from characterization chart in FIG. 10, a monitor with theantenna placed at 5″ from the event would generate 3V output signal ifthe event was caused by 100V static voltage and discharges in a waycompliant with CDM model. In essence, a 100V CDM ESD Event would cause a3V output signal in a monitor placed 5″ away from it. Similarly, a 200VCDM ESD Event would cause a 3.7V output signal in a monitor placed 6″away from it. Such characterization is specific to a particular monitor.

FIGS. 11 a and b shows how the characterization data can be used fordirect display of the event parameters. FIG. 11 a shows the initialsetup that must be done before the measurements. In step 340, a distancefrom the anticipated discharge is set. In many cases it is known wherethe discharges will occur, such as in automated tools that handlesemiconductor devices. In step 342, the correlation factor, appropriateconversion formula or the look-up table according to the selecteddistance is determined. In step 344, if the ESD Event measurement deviceis expected to measure more than one model of discharge, this modelshould be set as well. In step 346, the correlation factor, appropriateconversion formula or the look-up table according to the selecteddischarge model is determined. Once these parameters are set, thenappropriate adjustments to the readings can be made. Depending onconstruction of the device, such adjustments can be made in analog form,such as gain changes, or in digital form by altering calculationsformulae or changing the look-up table parameters.

FIG. 11 b illustrates a method 350 for operation of the device inaccordance with the invention once the distance and discharge model havebeen set. Once the input signal is measured in step 252, its value isrecalculated in accordance to the correction factors for a particulardistance and a particular discharge model in step 354. The recalculationmay also take into account any characterization data of the device. Oncerecalculated, the data can be displayed in step 356 and/or sent to adata acquisition system in step 358.

FIG. 12 a illustrates an example of another embodiment of a device 400in accordance with the invention that employs this method. The ESD Eventmeter 400 has an antenna 402, a display 404 and control keys 406. FIG.12 b illustrates a screen shot of the device of FIG. 12 a during set-upwherein the distance from the discharge 410 is set using keys 412. Themodel of discharge 414 is set using key 416. This particular screenshows the CDM discharge mode. FIG. 12 c illustrates a screen shot of thedevice of FIG. 12 a during HBM discharge model selection. FIG. 12 dillustrates a screen shot of the device of FIG. 12 a showing themeasurement results after the setup. In this particular case, an upperrow 420 depicts discharge strength of 200V (CDM model). A lower row 422depicts count of discharges. It should be obvious to a skilled in artthat instead of a hand-held meter, a stationary or a mobile monitorperforming essentially the same function can be used within constraintsof the proposed invention and the display can be augmented and/orreplaced by an output to a data acquisition system via numerousavailable means.

FIG. 13 a illustrates an example of another embodiment of the device inaccordance with the invention. In this embodiment, instead of the manualsetting of the distance, an automatic means of distance measurements areincorporated into the device. An automatic distance measurement device402 is shown in FIG. 13 a. The device 402 can measure the distance byvarious means, such as by using ultrasonic, light-based, mechanical(extending rod) or any other means to determine the distance. Thelight-based distance measurement unit may be any unit that is able tomeasure a distance using light energy, such as an infrared distancemeasurement unit. FIG. 13 b illustrates a method for measurement 500 inaccordance with the invention. In this method, the input signal anddistance are measured, preferably, simultaneously in steps 502 and 504,unless the monitor is stationary and the distance does not change often.In step 506, the measured value is recalculated based on measureddistance and the resulting data presented on the display in step 508and/or sent to a data acquisition system in step 510. It should be notedthat not only ESD Event measurements can benefit from this approach, butother distance-dependent measurements such as static voltagemeasurements can benefit from that. Currently, static voltmeters have tobe at a fixed distance from the measured surface (typically, 1″). Usingthis methodology and such device, accurate measurements can be done atany reasonable distance.

In accordance with the invention, it is often desirable to be able tohave a device/circuit that determines the type of discharge that hasoccurred wherein the types may include charge device model (CDM),machine model (MM) or human body model (HBM). FIG. 14 a illustrates anembodiment of a circuit 990 in accordance with the invention fordetermining the type of discharge and FIGS. 14 b, 14 c and 14 d showtypical waveforms for a CDM, MM and HBM discharge, respectively. Asshown in FIG. 14 b, the Charge Device Model discharge is the shortestone lasting typically few nanoseconds, while Machine Model (MM)discharge lasts typically 20 nanoseconds (FIG. 14 c) and Human BodyModel (HBM) discharge lasts 100 nanoseconds or even longer as shown inFIG. 14 d.

As seen in FIG. 14 a, an antenna 30 is connected to the input of anoptional high-frequency preamplifier 1000 that amplifies weak signals.The output of the preamplifier 1000 is connected to a first input of acomparator 1002. A second input of the comparator is connected to avoltage reference 1004 that could be implemented in various well knownmanners. An output of the comparator is connected to an enable input ofa counter 1008 in a way that, in the absence of a signal output from thecomparator, the counter is effectively disabled. When a dischargeoccurs, the signal at first input of the comparator 1002 will exceed thevoltage reference level (Vref) and the comparator will generate a signalat its output. This signal will enable the counter 1008 which then willbegin a count of pulses from an oscillator 1010 connected to thecount/clock input of the counter. When the input signal drops below thethreshold of comparator 1002, the count stops. The output of the counter1008 may be connected to an input of a digital comparator 1012 thatmakes a determination of type of discharge based on the number of pulsesthat occur which corresponds to the duration of the input signal pulseas shown in FIGS. 14 b-14 d wherein a longer duration pulse (FIG. 14 d)results in a greater number of pulses. Thus, the digital comparatorcompares the number of pulses generated during the input signal andcompares that number to a stored number of pulses for each type ofdischarge and determines the type of discharge. Once the determinationis completed, the counter is reset (not shown). In this embodiment, thecircuit 990 is implemented in an inexpensive way using commoncomponents. It should be noted that the function of the digitalcomparator 1012 can be performed by a microprocessor instead.

FIG. 15 a depicts another embodiment of the circuit 990 in which likeelements have the same reference numbers and perform similar functionsunless indicated otherwise. In this embodiment of the circuit 990, thecounter 1008 may be replaced by a shift register 1020 wherein during theinput signal duration, the shift register 1020 generates a series of “1”s and wherein the determination of the type of discharge is made basedon number of “1s” at the output of register by the digital comparator1012 whose function can be performed also by a microprocessor (notshown). FIGS. 15 b-d illustrates the waveforms that are substantiallysimilar to FIGS. 14 b-d.

FIG. 16 a depicts the circuit 990 of FIG. 14 a or 15 a with the additionof an envelope detector 1030. The envelope detector 1030 converts acomplex waveform of the discharge (such as that shown in FIG. 16 b) toan easier to manage waveform shown in FIG. 16 c. This envelope detectorcan be of any suitable type and its specific construction is notdiscussed herein in any detail since envelope detectors are well known.

FIG. 17 a illustrates another embodiment of the circuit 990 of FIG. 14 aor 15 a with the envelope detector 1030 wherein the antenna 30 of FIG.17 a is connected to the optional preamplifier 1000 and further to theoptional envelope detector 1030. The output of the envelope detector1030 is connected to a high-speed analog-to-digital converter 1050 thatconverts this signal into digital format that is passed onto amicroprocessor 1052.

FIG. 17 b illustrates the operation of the circuit shown in FIG. 17 a.In steps 1100 and 1102, the first readings are measured and themicroprocessor (based on embedded software being executed by themicroprocessor) determines if the event is beginning. In step 1104, oncethe beginning of an event is determined (a sharp jump in the inputsignal), the magnitude of the first sample is stored in the memoryassociated with the microprocessor that may be a register or a separatememory device. In step 1106, another measurement is done very shortlyafter the first one and then stored in step 1108. In step 1110, if thesecond reading is the same or higher than the first reading, then theevent is deemed a non-ESD Event and is discarded in step 1112. If thesecond reading is lower than the first one, then the first reading inmemory is replaced with the second one and subsequent readings aremeasured and stored in step 1114. After that, every consecutive sampleis compared with the previous sample. If a magnitude of a consecutivesample is the same or higher than the previous sample, the event is notan ESD Event and is discarded in step 1118. If the consecutive sample islower in amplitude than the previous sample until the input signalreaches zero or near zero, the entire event is considered to be an ESDEvent in step 1120. In step 1122, the rate of decay of the signal isanalyzed by the software of the microprocessor and, in step 1124, a typeof event can be determined. The accuracy of this determination improvesif the absolute amplitude of the signal is taken into account.

FIG. 18 a illustrates another embodiment of the circuit 990 of FIG. 14 aor 15 a with the envelope detector 1030 wherein the antenna of FIG. 18 ais connected to the optional preamplifier 1000 and further to theoptional envelope detector 1030. In this embodiment, a peak-holddetector 1060 may be used instead of the more expensive A/D converter1050 in FIG. 17 a. The peak-hold detector 1060 may be on any suitableconstruction and may have a clock signal source 1062 and may hold thehighest level of the signal that is output from the envelope detector1030 and be able to be reset on the clock pulses. Then, the output fromthe peak-hold detector is compared to the output signal of the envelopedetector (or the signal from the antenna if the preamplifier andenvelope detector are not used) by a comparator 1064. The output fromthe comparator 1064 is fed into a microprocessor 1066 that operates inthe same manner and has the same functions as the microprocessor shownin FIG. 17 a.

FIG. 18 b illustrates the operation of the circuit 990 shown in FIG. 18a which is similar to the operation of the circuit of FIG. 17 a exceptthat it does not require an expensive and power-consuming A/D converter.The disadvantage of this method as compared to the one of FIG. 17 b isthat the absolute magnitude of the signal cannot be measured. In step1130, the maximum signal level of the input signal is captured by thepeak-hold detector and the method goes through a wait step 1132. In step1134, the current value of the input signal is compared to the signallevel stored in the peak-hold detector by the comparator 1064. In step1136, the software of the microprocessor determines if the new signal islower than the stored signal based on the output of the op-amp 1064. Instep 1138, if the new signal is greater than or equal to the storedlevel, then the input signal is not from an ESD Event. However, if thenew signal is lower than the stored signal, then the new signal isstored in the peak-hold detector in step 1140. In step 1142, thesoftware of the microprocessor counts the number of cycles that it takesto bring the signal to zero and then determines the type of dischargebased on the counted number of cycles in step 1144.

While the foregoing has been with reference to a particular embodimentof the invention, it will be appreciated by those skilled in the artthat changes in this embodiment may be made without departing from theprinciples and spirit of the invention, the scope of which is defined bythe appended claims.

1. A device for the detection of electromagnetic emission events,comprising: a receiver that receives an electromagnetic emission; alow-bandwidth active electronic circuit with a bandwidth lower than abandwidth of the received electromagnetic emission, the low-bandwidthactive electronic circuit generating a slowly decaying output signal inresponse to the received electromagnetic emission having a predeterminedrise time so that an electromagnetic emission event with a predeterminedrise time is identified, wherein the low-bandwidth active electroniccircuit further comprises an operational amplifier comprising a firstdiode and a second diode placed between an inverting input of theoperational amplifier and an output of the operational amplifier toincrease the dynamic range of the gain of the operational amplifier. 2.A device for the detection of electromagnetic emission events,comprising: a receiver that receives an electromagnetic emission; alow-bandwidth active electronic circuit with a bandwidth lower than abandwidth of the received electromagnetic emission, the low-bandwidthactive electronic circuit generating a slowly decaying output signal inresponse to the received electromagnetic emission having a predeterminedrise time so that an electromagnetic emission event with a predeterminedrise time is identified; and a pattern recognizer that recognizes apattern of a particular electromagnetic emission based on a signalwaveform.
 3. The device of claim 2, wherein the pattern recognizerfurther comprises a window comparator.
 4. The device of claim 3, whereinthe window comparator determines if an envelope of an output signal ofthe low-bandwidth active electronic circuit is comparable to apredetermined signal having a predetermined envelope.
 5. The device ofclaim 2, wherein the pattern recognizer further comprises a processorthat is part of the device, the processor executing a program to performthe pattern recognition and determines if an envelope of an outputsignal of the low-bandwidth active electronic circuit is comparable to apredetermined signal having a predetermined envelope.
 6. A device forthe detection of electromagnetic emission events, comprising: a receiverthat receives an electromagnetic emission; a low-bandwidth activeelectronic circuit with a bandwidth lower than a bandwidth of thereceived electromagnetic emission, the low-bandwidth active electroniccircuit generating a slowly decaying output signal in response to thereceived electromagnetic emission having a predetermined rise time sothat an electromagnetic emission event with a predetermined rise time isidentified, wherein the low-bandwidth active electronic circuit furthercomprises an operational amplifier; a high-pass filter coupled to anoutput of the low-bandwidth active electronic circuit; and a peakdetector coupled to an output of the high-pass filter, the peak detectorhaving a time constant substantially similar to an output signal of thelow-bandwidth active electronic circuit to an electromagnetic emissionwith the predetermined rise time.
 7. The device of claim 6, wherein anoutput signal of the peak detector is measured to determine a strengthof the electromagnetic emission.